Surface Roughness Profile Measurement Based on Microscopic Shearing Interferometry

Surface roughness is an important feature of engineering surfaces. For surface roughness profile measurement, most of the exiting methods [1-6] would require isolated conditions to reduce the effect of base vibrations. The scattering interference method [7-8], based on a statistical algorithm together with comparison, may be used in a production environment, but the accuracy and reliability are limited. More importantly, the existing methods could not obtain roughness profiles for further analysis.